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Franssila, Sami. 4 0

Introduction to microfabrication / 6 6 Sami Franssila. - Second edition. - - xiv, 518 pages : illustrations 26 cm. - - - - - . - . - 0 . - . - 0 .



Includes bibliographical references and index.



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ISBN: 9780470749838 (cloth)

ISSN: 2 = =

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Nat. Bib. No.: 2

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Microelectromechanical systems.;Electronic apparatus and appliances.;Microfabrication.;Integrated circuits.;Semiconductor processing.;Nanotechnology. ----------

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LC Class. No.: TK7875 / .F73 20102

Dewey Class. No.: 621.381 F857i 2010 / 222

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