Franssila, Sami.  4  0   <br/><br/>
Introduction to microfabrication /        6 
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Sami Franssila. 
 - Second edition.   
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 - xiv, 518 pages :  illustrations   26 cm.     
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<br/><br/>Includes bibliographical references and index. 
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<br/><br/><label>ISBN: </label>9780470749838 (cloth)   
<br/><br/><label>ISSN: </label>2 
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<br/><br/><label>Nat. Bib. No.: </label> 2 
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<br/><br/><label>Subjects--Personal Names: </label><br/>     2     --0------
<br/><br/><label>Subjects--Corporate Names: </label><br/>     6 --0-- 2 --------
<br/><br/><label>Subjects--Meeting Names: </label><br/><br/> 0    2 --
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<br/><br/><label>Subjects--Chronological Terms: </label><br/> 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectromechanical systems.;Electronic apparatus and appliances.;Microfabrication.;Integrated circuits.;Semiconductor processing.;Nanotechnology.    ----------
<br/><br/><label>Subjects--Geographic Terms: </label><br/>--------20--
<br/><br/><label>Index Terms--Genre/Form: </label><br/>----2
<br/><br/><label>LC Class. No.: </label>TK7875  / .F73 20102 
<br/><br/><label>Dewey Class. No.: </label>621.381 F857i 2010  / 222 
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