Introduction to microfabrication - Franssila, Sami. 4 0 16; 5 (Chichester, West Sussex UK : John Wiley & Sons, 2010)
Includes bibliographical references and index.
Keywords: 2 -- 0; 6; Microelectromechanical systems.;Electronic apparatus and appliances.;Microfabrication.;Integrated circuits.;Semiconductor processing.;Nanotechnology.; 20; 2