TY  - BOOK
AU  - Franssila, Sami.
AU  - 
ED  - 
ED  - 
ED  - 
ED  - 
SN  - 9780470749838 (cloth)
SN  - 2
PY  - 2010///46
CY  - Chichester, West Sussex UK
PB  - John Wiley & Sons
KW  - 
KW  - 2
KW  - 0
KW  - 6
KW  - 20
KW  - Microelectromechanical systems.;Electronic apparatus and appliances.;Microfabrication.;Integrated circuits.;Semiconductor processing.;Nanotechnology
KW  - sears;sears;sears0
N1  - Includes bibliographical references and index; 5
ER  -