TY  - BOOK
AU  - Van Zant, Peter.
AU  - 
ED  - 
ED  - 
ED  - 
ED  - 
TI  - : a practical guide to semiconductor processing
SN  - 0-07-143241-8 (hardcover)
SN  - 2
PY  - 2004///.46
CY  - New York, NY
PB  - McGraw-Hill Companies, Inc.
KW  - 
KW  - 2
KW  - 0
KW  - 6
KW  - 20
KW  - Design and construction.;Design and construction
KW  - Semiconductors;Integrated circuits
N1  - Includes bibliographical references and index; 5
ER  -